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Public service evidence

Institute for Electronics and Nanotechnology Micro/Nano Fabrication Facility

Institute for Electronics and Nanotechnology Micro/Nano Fabrication Facility at Georgia Institute of Technology provides shared-facility access for nanofabrication and microfabrication, and surface and thin-film characterization. Registration, training, project review, fees, and current instrument availability may apply.

External services publicly offered

2 capabilities 4 equipment records Reviewed 2026-08-26

Publicly described capabilities

Fabrication

Nanofabrication and microfabrication

Advanced characterization

Surface and thin-film characterization

Technical inventory

Techniques and equipment

1 equipment type
  • Micro/nanofabrication

    cleanroom process equipment

  • Micro/nanofabrication

    electron-beam lithography system

  • Micro/nanofabrication

    photolithography system

  • Micro/nanofabrication

    thin-film deposition system

Registry scope evidence

  • External access: External academic users may request services or complete a facility-use agreement for on-site equipment access..
  • Capabilities: SUMS lists the IMS Micro/Nano Fabrication Facility and its searchable equipment..
  • Address: Georgia Tech SUMS lists 791 Atlantic Drive..

Evidence used for this listing

Vicena compiles these public listings from cited laboratory sources. A listing does not imply a partnership, current availability, pricing, or acceptance of a project. This profile is not an endorsement, availability check, quote, or representation of a commercial relationship.