Public service evidence
Micro Nano Technology Center (MNTC)
Micro Nano Technology Center (MNTC) at University of Louisville provides shared-facility access for nanofabrication and microfabrication, and surface and thin-film characterization. Registration, training, project review, fees, and current instrument availability may apply.
External services publicly offered
Publicly described capabilities
Fabrication
Nanofabrication and microfabrication
Advanced characterization
Surface and thin-film characterization
Technical inventory
Techniques and equipment
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Micro/nanofabrication
cleanroom micro/nanofabrication equipment listed by Louisville Micro/Nano Technology Center
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Micro/nanofabrication
Deposition includes Oxford Plasmalab 100 PECVD, Lesker PVD 75, Technics 4604, Lesker e-beam evaporation, SCS Parylene C, Applied MST MVD and Beneq TFS-200 PEALD/ALD.
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Micro/nanofabrication
Etch/bonding tools include Oxford Estrellas DRIE, Trion Phantom Minilock III ICP etcher, Xactix XeF2, Primaxx uEtch HF-vapor release and Suss SB6e wafer bonder/hot embosser.
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Micro/nanofabrication
Metrology/packaging includes Veeco Dektak 8M, Zygo optical profiling, Woollam VASE, Filmetrics, Veeco FPP-5000, Disco dicing, Kulicke & Soffa wire bonders, Finetech Fineplacer Pico and LPKF PCB milling.
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Micro/nanofabrication
Photolithography equipment includes Heidelberg DWL 66FS direct-write/mask generation, Suss MA6/BA6 and AB-M mask aligners and a YES image-reversal/HMDS system.
Registry scope evidence
- ◇Facility: 10,000-square-foot class 100/1000 cleanroom with imaging and bioimaging labs.
- ◇External scope: Supports academic institutions, startups and businesses.
- ◇Production scope: Open for prototyping and small-scale manufacturing.
- ◇Official-source, facility-specific instrument evidence is available. Current configuration, availability, price, and project fit require confirmation.
Evidence used for this listing
Vicena compiles these public listings from cited laboratory sources. A listing does not imply a partnership, current availability, pricing, or acceptance of a project. This profile is not an endorsement, availability check, quote, or representation of a commercial relationship.