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Public service evidence

Microelectronics Research Center (MRC)

Microelectronics Research Center (MRC) at The University of Texas at Austin provides shared-facility access for nanofabrication and microfabrication, and surface and thin-film characterization. Registration, training, project review, fees, and current instrument availability may apply.

External services publicly offered

2 capabilities 13 equipment records Reviewed 2026-08-29

Publicly described capabilities

Fabrication

Nanofabrication and microfabrication

Advanced characterization

Surface and thin-film characterization

Explore the equipment

Instrument models

1 illustrated model

CAD illustrations show the instrument model. Confirm the installed configuration and current availability with the lab.

Technical inventory

Techniques and equipment

4 equipment types

  • Micro/nanofabrication

    cleanroom process equipment

  • Micro/nanofabrication

    electron-beam lithography system

  • Laboratory equipment

    nanoscale metrology instrument

  • Micro/nanofabrication

    plasma etching system

  • Laboratory equipment

    semiconductor process equipment

  • Micro/nanofabrication

    thin-film deposition system

  • Micro/nanofabrication

    Cambridge NanoTech Savannah 200 atomic-layer-deposition system in MER 1.704.

  • Micro/nanofabrication

    Corial210 chlorine ICP etcher for III-V materials and Corial210 fluorine ICP etcher for silicon, in MER 1.736 and 1.738 respectively.

  • Micro/nanofabrication

    Fiji F200 atomic-layer-deposition system with remote plasma and ozone generator in MER 1.756.

  • Spectroscopy

    J.A. Woollam IR-VASE, M-2000 DI and RC2 ellipsometers listed in the facility tool directory.

  • Laboratory equipment

    JEOL 8100 electron-beam writer in MER 1.720A.

  • Micro/nanofabrication

    Raith E-line electron-beam lithography system in MER 1.730A.

  • Microscopy & imaging

    Two Bruker Icon atomic force microscopes in MER 1.728.

Registry scope evidence

  • ◇Facility: 12,000 square feet of shared class 100/1000 cleanroom supports silicon, III-V and soft materials..
  • ◇Capabilities: Sub-20 nm e-beam lithography, deposition, etching, thermal processing and characterization are offered..
  • ◇Address: Official contact page identifies Building 160 at J.J. Pickle Research Campus..
  • ◇Official-source, facility-specific instrument evidence is available. Current configuration, availability, price, and project fit require confirmation.

Evidence used for this listing

Facility-owned shared-access information Reviewed 2026-08-26Facility-owned shared-access information Reviewed 2026-08-26Facility-owned shared-access information Reviewed 2026-08-26Facility-owned shared-access information Reviewed 2026-08-26Facility-owned shared-access information Reviewed 2026-08-26Microelectronics Research Center (MRC) official instrument evidence Reviewed 2026-08-29

Vicena compiles these public listings from cited laboratory sources. A listing does not imply a partnership, current availability, pricing, or acceptance of a project. This profile is not an endorsement, availability check, quote, or representation of a commercial relationship.