Montana Microfabrication Facility (MMF)

• Micro/nanofabrication

  cleanroom lithography, deposition, etching and packaging equipment listed by MMF

• Micro/nanofabrication

  Deposition inventory includes Angstrom AMOD and EvoVac evaporators, Angstrom sputter, Denton BTT thermal evaporator, Anric AT-410 ALD and ECSI Fibrotools IKO JK electroplater.

• Laboratory equipment

  Dry-processing inventory includes Oxford ICP and PVA Tepla Ion 10; thermal tools include ATV PEO 603, Modulab oxidation/phosphorus furnaces, Lindberg/Blue boron furnace and Allwin21 AccuThermo AW 610M.

• Micro/nanofabrication

  Lithography equipment includes an ABM contact aligner, YES III vapor-prime oven, Headway/solvent spinner bench and Laurell spin coater.

• Spectroscopy

  Metrology includes Keyence VK-X3000, Filmetrics F3, Dektak XTa, Angstrom Sun ellipsometer, Jandell RM3 and semiconductor analyzer/probe station.

• Synthesis & processing

  Microfluidics tools include Flacktek DAC 330-100 SE mixer and Harrick HP-001 high-power cleaner.

• Micro/nanofabrication

  Packaging equipment includes K&S 4523AD wedge bonder, AML wafer bonder and Disco DAD 3221 dicing saw.

Registry scope evidence

• ◇Access: Open-access facility serving external academics and commercial entities; users may work directly or contract staff services..
• ◇Facility: Includes 2,200 square feet of Class 1,000 and Class 10,000 cleanroom laboratories and BSL-1/BSL-2 microfluidic work areas..
• ◇Capabilities: Lithography, thin-film deposition, thermal processing, wet and dry etching, packaging, testing and bio-integrated fabrication..
• ◇Official-source, facility-specific instrument evidence is available. Current configuration, availability, price, and project fit require confirmation.

Evidence used for this listing