Public service evidence
Northwestern University Micro/Nano Fabrication Facility (NUFAB)
Northwestern University Micro/Nano Fabrication Facility (NUFAB) at Northwestern University provides shared-facility access for nanofabrication and microfabrication, and surface and thin-film characterization. Registration, training, project review, fees, and current instrument availability may apply.
External services publicly offered
Publicly described capabilities
Fabrication
Nanofabrication and microfabrication
Advanced characterization
Surface and thin-film characterization
Technical inventory
Techniques and equipment
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Micro/nanofabrication
cleanroom process equipment
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Laboratory equipment
nanoscale metrology instrument
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Micro/nanofabrication
photolithography system
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Micro/nanofabrication
plasma etching system
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Micro/nanofabrication
thin-film deposition system
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Micro/nanofabrication
AJA Orion sputter system; exact-facility page links the tool to a named equipment manager and NUcore reservation.
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Microscopy & imaging
Bruker Edge atomic force microscope with 90 x 90 micrometre XY scan range, 10 micrometre Z range, PeakForce Tapping, tapping and contact modes.
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Laboratory equipment
Keysight B1500A electrical test system with Signatone probe station, four standard probes, two RF probes and configurations to 40 GHz.
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Laboratory equipment
Wet-processing catalog lists an Osiris CHEMIXX MASK 30 E automatic acid-etch system and a Tousimis Automegasamdri critical-point dryer.
Registry scope evidence
- ◇External access: NUFAB accepts external users through the NUcore reservation and training process..
- ◇Network membership: NUFAB is part of Northwestern SHyNE/NNCI shared infrastructure..
- ◇Official-source, facility-specific instrument evidence is available. Current configuration, availability, price, and project fit require confirmation.
Evidence used for this listing
Vicena compiles these public listings from cited laboratory sources. A listing does not imply a partnership, current availability, pricing, or acceptance of a project. This profile is not an endorsement, availability check, quote, or representation of a commercial relationship.