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Public service evidence

Northwestern University Micro/Nano Fabrication Facility (NUFAB)

Northwestern University Micro/Nano Fabrication Facility (NUFAB) at Northwestern University provides shared-facility access for nanofabrication and microfabrication, and surface and thin-film characterization. Registration, training, project review, fees, and current instrument availability may apply.

External services publicly offered

2 capabilities 9 equipment records Reviewed 2026-08-29

Publicly described capabilities

Fabrication

Nanofabrication and microfabrication

Advanced characterization

Surface and thin-film characterization

Technical inventory

Techniques and equipment

3 equipment types
  • Micro/nanofabrication

    cleanroom process equipment

  • Laboratory equipment

    nanoscale metrology instrument

  • Micro/nanofabrication

    photolithography system

  • Micro/nanofabrication

    plasma etching system

  • Micro/nanofabrication

    thin-film deposition system

  • Micro/nanofabrication

    AJA Orion sputter system; exact-facility page links the tool to a named equipment manager and NUcore reservation.

  • Microscopy & imaging

    Bruker Edge atomic force microscope with 90 x 90 micrometre XY scan range, 10 micrometre Z range, PeakForce Tapping, tapping and contact modes.

  • Laboratory equipment

    Keysight B1500A electrical test system with Signatone probe station, four standard probes, two RF probes and configurations to 40 GHz.

  • Laboratory equipment

    Wet-processing catalog lists an Osiris CHEMIXX MASK 30 E automatic acid-etch system and a Tousimis Automegasamdri critical-point dryer.

Registry scope evidence

  • External access: NUFAB accepts external users through the NUcore reservation and training process..
  • Network membership: NUFAB is part of Northwestern SHyNE/NNCI shared infrastructure..
  • Official-source, facility-specific instrument evidence is available. Current configuration, availability, price, and project fit require confirmation.

Evidence used for this listing

Vicena compiles these public listings from cited laboratory sources. A listing does not imply a partnership, current availability, pricing, or acceptance of a project. This profile is not an endorsement, availability check, quote, or representation of a commercial relationship.