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Public service evidence

Shared Materials Instrumentation Facility (SMIF)

Shared Materials Instrumentation Facility (SMIF) at Duke University provides shared-facility access for nanofabrication and microfabrication, and materials characterization. Registration, training, project review, fees, and current instrument availability may apply.

External services publicly offered

2 capabilities 7 equipment records Reviewed 2026-08-29

Publicly described capabilities

Fabrication

Nanofabrication and microfabrication

Materials testing

Materials characterization

Explore the equipment

Instrument models

1 illustrated model

CAD illustrations show the instrument model. Confirm the installed configuration and current availability with the lab.

CAD illustration of Kurt J. Lesker ALD-150LX Model illustration

Atomic-layer deposition system

Kurt J. Lesker ALD-150LX

Equipment evidence

Cleanroom inventory includes Kurt Lesker ALD-150LX, Glow Research AutoGlow 200, CHA Solution E-Beam, Kurt Lesker PVD 75, Advanced Vacuum Vision 310, Karl Suss MA6/BA6, Trion Phantom II/Minilock II, SPTS Pegasus and Elionix ELS-7500 EX.

Source 1 ↗Source 2 ↗Source 3 ↗Source 4 ↗Source 5 ↗

Technical inventory

Techniques and equipment

5 equipment types

  • Micro/nanofabrication

    cleanroom process equipment

  • Laboratory equipment

    electrical device characterization equipment

  • Microscopy & imaging

    microscope

  • Surface analysis

    Characterization includes Nikon XT H 225 ST microCT, Thermo Scientific Nexsa G2 XPS, Anton Paar XRDynamic 500 XRD, Horiba LabRam ARAMIS, Shimadzu UV-3600i, Thermo Nicolet iS50/RaptIR+, Asylum Cypher/Jupiter XR AFMs and SAXSLab Ganesha.

  • Micro/nanofabrication

    Cleanroom inventory includes Kurt Lesker ALD-150LX, Glow Research AutoGlow 200, CHA Solution E-Beam, Kurt Lesker PVD 75, Advanced Vacuum Vision 310, Karl Suss MA6/BA6, Trion Phantom II/Minilock II, SPTS Pegasus and Elionix ELS-7500 EX.

  • Microscopy & imaging

    Microscopy includes Thermo Fisher Apreo S SEM, Hitachi TM3030Plus, FEI Tecnai G2 Twin, Thermo Fisher Krios G2i/Tundra cryo-TEM and planned Helios 5 CX/JEOL GrandARM II systems.

  • Thermal & mechanical

    Soft-materials systems include TA DSC 2500, Anton Paar MCR 302e, TA RSA-G2, ZetaSizer Ultra Red, Leica Stellaris 5 and Cytiva Biacore T200.

Registry scope evidence

  • ◇Access: Open to trained users, including external academic and industry users; staff can also run samples as a service..
  • ◇Facility: Contains 7,000 square feet of cleanroom fabrication space and nearly 3,000 square feet of characterization and imaging laboratories..
  • ◇Scope: Supports characterization, imaging and cleanroom fabrication for nanotechnology, biomaterials, optoelectronics, sensors and energy research..
  • ◇Official-source, facility-specific instrument evidence is available. Current configuration, availability, price, and project fit require confirmation.

Evidence used for this listing

Facility-owned shared-access information Reviewed 2026-08-26Facility-owned shared-access information Reviewed 2026-08-26Facility-owned shared-access information Reviewed 2026-08-26Facility-owned shared-access information Reviewed 2026-08-26Shared Materials Instrumentation Facility (SMIF) official instrument evidence Reviewed 2026-08-29

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