Public service evidence
Singh Center for Nanotechnology Quattrone Nanofabrication Facility
Singh Center for Nanotechnology Quattrone Nanofabrication Facility at University of Pennsylvania provides shared-facility access for nanofabrication and microfabrication, and surface and thin-film characterization. Registration, training, project review, fees, and current instrument availability may apply.
External services publicly offered
Publicly described capabilities
Fabrication
Nanofabrication and microfabrication
Advanced characterization
Surface and thin-film characterization
Technical inventory
Techniques and equipment
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Micro/nanofabrication
electron-beam and optical lithography systems
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Laboratory equipment
packaging and metrology tools
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Laboratory equipment
plasma and wet etching systems
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Micro/nanofabrication
thin-film deposition systems
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Laboratory equipment
Cambridge/Veeco Savannah S200 ALD coat substrates through 200 mm and ultra-high-aspect-ratio structures; Oxford PlasmaLab 100 PECVD deposits SiO2, Si3N4 and amorphous Si to 400 C.
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Micro/nanofabrication
Heidelberg DWL66+ 405-nm laser writer patterns photomasks and 10 mm pieces through 6-inch wafers at 0.6-2 micrometre resolution depending on lens.
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Micro/nanofabrication
IPG IX280-DXF and IX-255 laser systems support drilling, dicing, thin-film removal and micromachining in ceramics, metals, polymers, glass, PDMS and semiconductors.
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Laboratory equipment
Nanonex NX-2600 supports thermal, photocurable and embossing nanoimprint with sub-5-nm imprint resolution and sub-micrometre alignment; Nanoscribe Photonic Professional GT provides two-photon 3D printing.
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Laboratory equipment
Raith EBPG5200+ 100 kV EBL has a 125 MHz pattern generator, 350 nA maximum current and sub-8-nm linewidth with better-than-10-nm stitching/overlay.
Registry scope evidence
- ◇Facility role: Nanofabrication subfacility within the Singh Center.
- ◇Commercial terms: Published fee system includes external user categories and QNF area charges.
- ◇Official-source, facility-specific instrument evidence is available. Current configuration, availability, price, and project fit require confirmation.
Evidence used for this listing
Vicena compiles these public listings from cited laboratory sources. A listing does not imply a partnership, current availability, pricing, or acceptance of a project. This profile is not an endorsement, availability check, quote, or representation of a commercial relationship.