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Micro Nano Technology Center (MNTC)

Micro Nano Technology Center (MNTC) at University of Louisville provides shared-facility access for nanofabrication and microfabrication, and surface and thin-film characterization. Registration, training, project review, fees, and current instrument availability may apply.

公开提供对外服务

2 项服务能力 5 条设备记录 核查于 2026年8月29日

公开描述的能力

Fabrication

Nanofabrication and microfabrication

Advanced characterization

Surface and thin-film characterization

技术清单

技术与设备

1 类设备
  • 微纳加工

    cleanroom micro/nanofabrication equipment listed by Louisville Micro/Nano Technology Center

  • 微纳加工

    Deposition includes Oxford Plasmalab 100 PECVD, Lesker PVD 75, Technics 4604, Lesker e-beam evaporation, SCS Parylene C, Applied MST MVD and Beneq TFS-200 PEALD/ALD.

  • 微纳加工

    Etch/bonding tools include Oxford Estrellas DRIE, Trion Phantom Minilock III ICP etcher, Xactix XeF2, Primaxx uEtch HF-vapor release and Suss SB6e wafer bonder/hot embosser.

  • 微纳加工

    Metrology/packaging includes Veeco Dektak 8M, Zygo optical profiling, Woollam VASE, Filmetrics, Veeco FPP-5000, Disco dicing, Kulicke & Soffa wire bonders, Finetech Fineplacer Pico and LPKF PCB milling.

  • 微纳加工

    Photolithography equipment includes Heidelberg DWL 66FS direct-write/mask generation, Suss MA6/BA6 and AB-M mask aligners and a YES image-reversal/HMDS system.

登记范围证据

  • ◇Facility: 10,000-square-foot class 100/1000 cleanroom with imaging and bioimaging labs.
  • ◇External scope: Supports academic institutions, startups and businesses.
  • ◇Production scope: Open for prototyping and small-scale manufacturing.
  • ◇Official-source, facility-specific instrument evidence is available. Current configuration, availability, price, and project fit require confirmation.

本条目依据的证据

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