有公开服务证据
Microelectronics Research Center (MRC)
Microelectronics Research Center (MRC) at The University of Texas at Austin provides shared-facility access for nanofabrication and microfabrication, and surface and thin-film characterization. Registration, training, project review, fees, and current instrument availability may apply.
公开提供对外服务
公开描述的能力
Fabrication
Nanofabrication and microfabrication
Advanced characterization
Surface and thin-film characterization
了解设备
仪器型号
CAD 示意图展示的是仪器型号。实际安装配置和当前可用性需向实验室确认。
技术清单
技术与设备
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微纳加工
cleanroom process equipment
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微纳加工
electron-beam lithography system
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实验室设备
nanoscale metrology instrument
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微纳加工
plasma etching system
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实验室设备
semiconductor process equipment
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微纳加工
thin-film deposition system
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微纳加工
Cambridge NanoTech Savannah 200 atomic-layer-deposition system in MER 1.704.
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微纳加工
Corial210 chlorine ICP etcher for III-V materials and Corial210 fluorine ICP etcher for silicon, in MER 1.736 and 1.738 respectively.
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微纳加工
Fiji F200 atomic-layer-deposition system with remote plasma and ozone generator in MER 1.756.
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光谱
J.A. Woollam IR-VASE, M-2000 DI and RC2 ellipsometers listed in the facility tool directory.
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实验室设备
JEOL 8100 electron-beam writer in MER 1.720A.
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微纳加工
Raith E-line electron-beam lithography system in MER 1.730A.
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显微与成像
Two Bruker Icon atomic force microscopes in MER 1.728.
登记范围证据
- ◇Facility: 12,000 square feet of shared class 100/1000 cleanroom supports silicon, III-V and soft materials..
- ◇Capabilities: Sub-20 nm e-beam lithography, deposition, etching, thermal processing and characterization are offered..
- ◇Address: Official contact page identifies Building 160 at J.J. Pickle Research Campus..
- ◇Official-source, facility-specific instrument evidence is available. Current configuration, availability, price, and project fit require confirmation.
本条目依据的证据
这些公开条目由 Vicena 根据所引用的实验室来源整理。被收录不代表存在合作关系，也不代表目前可承接、已有报价或已接受项目。本主页不构成推荐、可用性确认或报价，也不代表存在商业合作关系。