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Northwestern University Micro/Nano Fabrication Facility (NUFAB)

Northwestern University Micro/Nano Fabrication Facility (NUFAB) at Northwestern University provides shared-facility access for nanofabrication and microfabrication, and surface and thin-film characterization. Registration, training, project review, fees, and current instrument availability may apply.

公开提供对外服务

2 项服务能力 9 条设备记录 核查于 2026年8月29日

公开描述的能力

Fabrication

Nanofabrication and microfabrication

Advanced characterization

Surface and thin-film characterization

技术清单

技术与设备

3 类设备
  • 微纳加工

    cleanroom process equipment

  • 实验室设备

    nanoscale metrology instrument

  • 微纳加工

    photolithography system

  • 微纳加工

    plasma etching system

  • 微纳加工

    thin-film deposition system

  • 微纳加工

    AJA Orion sputter system; exact-facility page links the tool to a named equipment manager and NUcore reservation.

  • 显微与成像

    Bruker Edge atomic force microscope with 90 x 90 micrometre XY scan range, 10 micrometre Z range, PeakForce Tapping, tapping and contact modes.

  • 实验室设备

    Keysight B1500A electrical test system with Signatone probe station, four standard probes, two RF probes and configurations to 40 GHz.

  • 实验室设备

    Wet-processing catalog lists an Osiris CHEMIXX MASK 30 E automatic acid-etch system and a Tousimis Automegasamdri critical-point dryer.

登记范围证据

  • ◇External access: NUFAB accepts external users through the NUcore reservation and training process..
  • ◇Network membership: NUFAB is part of Northwestern SHyNE/NNCI shared infrastructure..
  • ◇Official-source, facility-specific instrument evidence is available. Current configuration, availability, price, and project fit require confirmation.

本条目依据的证据

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