Public service evidence
ASU NanoFab
ASU NanoFab at Arizona State University provides shared-facility access for nanofabrication and microfabrication, surface and thin-film characterization, and materials characterization. Registration, training, project review, fees, and current instrument availability may apply.
External services publicly offered
Publicly described capabilities
Fabrication
Nanofabrication and microfabrication
Advanced characterization
Surface and thin-film characterization
Materials testing
Materials characterization
Technical inventory
Techniques and equipment
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Micro/nanofabrication
cleanroom metrology and packaging tools listed by ASU NanoFab
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Micro/nanofabrication
photolithography and electron-beam lithography tools
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Micro/nanofabrication
plasma etch and thin-film deposition tools
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Laboratory equipment
Cambridge Savannah ALD deposits Al2O3, TiO2 and HfO2 films.
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Micro/nanofabrication
Lesker #3/#4 four-pocket e-beam evaporators with 12-inch platens and Lesker #5 four-gun DC/RF sputter system support thin films.
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Laboratory equipment
OAI Model 800/808 front/backside mask aligner provides approximately 1-2 micrometre alignment accuracy.
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Laboratory equipment
Oxford PECVD deposits SiO2, Si3N4 and low-stress SiON with plasma-enhanced step coverage.
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Micro/nanofabrication
PlasmaLab M80 Plus chlorine/fluorine RIE, PlasmaTherm Apex ICP, STS AGE ICP and STS ASE DRIE support compound-semiconductor, dielectric and Bosch silicon etching.
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Laboratory equipment
SCS programmable spin coater applies photoresists, polyimides, silica films and other organic solutions.
Registry scope evidence
- ◇Access: Open to ASU, other institutions and industry; external companies may use staff foundry service or prototyping access..
- ◇Capabilities: Nanofabrication, silicon processing, molecular and bioelectronics, MEMS, nanofluidics, optoelectronics and device characterization..
- ◇Operations: Training and equipment scheduling are managed through iLab after onboarding..
- ◇Official-source, facility-specific instrument evidence is available. Current configuration, availability, price, and project fit require confirmation.
Evidence used for this listing
Vicena compiles these public listings from cited laboratory sources. A listing does not imply a partnership, current availability, pricing, or acceptance of a project. This profile is not an endorsement, availability check, quote, or representation of a commercial relationship.